Competitive mechanisms contribute to image contrast from dislocations in annular dark field scanning transmission electron microscopy ADF STEM. A clear theoretical understanding of the mechanisms underlying the ADF STEM contrast is therefore essential for correct interpretation of dislocation images. This paper reports on a systematic study of the ADF STEM contrast from dislocations in a GaN specimen, both experimentally and computationally. Systematic experimental ADF STEM images of the edge character dislocations revealed a number of characteristic contrast features that are shown to depend on both the angular detection range and specific position of the dislocation in the sample. A theoretical model based on electron channelling and Bloch wave scattering theories, supported by multislice simulations using Grillo s strain channelling equation, is proposed to elucidate the physical origin of such complex contrast phenomena.
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