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This paper introduces the first tunable ferroelectric capacitor (FeCAP) based unreleased RF MEMS resonator, integrated seamlessly in Texas Instruments 130nm Ferroelectric RAM (FeRAM) technology. An array of FeCAPs in this complementary metal-oxide-semiconductor (CMOS) technologys back-end-of-line (BEOL) process were used to define the acoustic resonance cavity as well as the electromechanical transducers. To achieve high quality factor (Q) of the resonator, acoustic waveguiding for vertical confinement within the CMOS stack is studied and optimized. Additional design considerations are discussed to obtain lateral confinement and suppression of spurious modes. An FeCAP resonator is demonstrated with fundamental resonance at 703 MHz and Q of 1012. This gives a frequency quality factor product fQ = 7.11$times$10$^1$$^1$ which is 1.6$times$ higher than the most state-of-the-art Pb(Zr,Ti)O$_3$ (PZT) resonators. Due to the ferroelectric characteristics of the FeCAPs, transduction of the resonator can be switched on and off by adjusting the electric polarization. In this case, the resonance can be turned off completely at $pm$0.3V corresponding to the coercive voltage of the constituent FeCAP transducers. These novel switchable resonators may have promising applications in on-chip timing, ad-hoc radio front ends, and chip-scale sensors.
We report on the design, fabrication, and characterization of compact tunable yttrium iron garnet (YIG) based RF resonators based on $mu$m-sized spin-wave cavities. Inductive antennas with both ladder and meander configurations were used as transduce
A novel photonics-based RF reception approach is proposed as a competitive solution to meet the current challenges of photonic-based approaches and to realize high performances at the same time. The proposed approach adopts the superheterodyne config
The ever-increasing demand for high speed and large bandwidth has made photonic systems a leading candidate for the next generation of telecommunication and radar technologies. The photonic platform enables high performance while maintaining a small
The concept of a nano-actuator that uses ferroelectric switching to generate enhanced displacements is explored using a phase-field model. The actuator has a ground state in the absence of applied electric field that consists of polarized domains ori
We create a Josephson parametric amplifier from a transmission line resonator whose inner conductor is made from a series SQUID array. By changing the magnetic flux through the SQUID loops, we are able to adjust the circuits resonance frequency and,