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Quantum fluctuations give rise to van der Waals and Casimir forces that dominate the interaction between electrically neutral objects at sub-micron separations. Under the trend of miniaturization, such quantum electrodynamical effects are expected to play an important role in micro- and nano-mechanical devices. Nevertheless, utilization of Casimir forces on the chip level remains a major challenge because all experiments so far require an external object to be manually positioned close to the mechanical element. Here, by integrating a force-sensing micromechanical beam and an electrostatic actuator on a single chip, we demonstrate the Casimir effect between two micromachined silicon components on the same substrate. A high degree of parallelism between the two near-planar interacting surfaces can be achieved because they are defined in a single lithographic step. Apart from providing a compact platform for Casimir force measurements, this scheme also opens the possibility of tailoring the Casimir force using lithographically defined components of non-conventional shapes.
Nanomechanical circuits for transverse acoustic waves promise to enable new approaches to computing, precision biochemical sensing and many other applications. However, progress is hampered by the lack of precise control of the coupling between nanom
Casimir and Casimir-Polder repulsion have been known for more than 50 years. The general Lifshitz configuration of parallel semi-infinite dielectric slabs permits repulsion if they are separated by a dielectric fluid that has a value of permittivity
Electrostatic and Casimir interactions limit the range of positional stability of electrostatically-actuated or capacitively-coupled mechanical devices. We investigate this range experimentally for a generic system consisting of a doubly-clamped Au s
It has always been conventionally understood that, in the dilute limit, the Casimir energy of interaction between bodies or the Casimir self-energy of a dielectric body could be identified with the sum of the van der Waals or Casimir-Polder energies
The Casimir force between two infinitely thin parallel sheets in a setting of $N$ such sheets is found. The finite two-dimensional conductivities, which describe the dispersive and absorptive properties of each sheet, are taken into account, whereupo