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We have designed and fabricated superconducting coplanar waveguide resonators with fundamental frequencies from 2 to $9 rm{GHz}$ and loaded quality factors ranging from a few hundreds to a several hundred thousands reached at temperatures of $20 rm{mK}$. The loaded quality factors are controlled by appropriately designed input and output coupling capacitors. The measured transmission spectra are analyzed using both a lumped element model and a distributed element transmission matrix method. The experimentally determined resonance frequencies, quality factors and insertion losses are fully and consistently characterized by the two models for all measured devices. Such resonators find prominent applications in quantum optics and quantum information processing with superconducting electronic circuits and in single photon detectors and parametric amplifiers.
The introduction of crystalline defects or dopants can give rise to so-called dirty superconductors, characterized by reduced coherence length and quasiparticle mean free path. In particular, granular superconductors such as Granular Aluminum (GrAl),
We describe measurements on microwave coplanar resonators designed for quantum bit experiments. Resonators have been patterned onto sapphire and silicon substrates, and quality factors in excess of a million have been observed. The resonant frequency
We report on the design, fabrication and characterization of superconducting coplanar waveguide resonators with nanoscopic constrictions. By reducing the size of the center line down to 50 nm, the radio frequency currents are concentrated and the mag
Thin films of TiN were sputter-deposited onto Si and sapphire wafers with and without SiN buffer layers. The films were fabricated into RF coplanar waveguide resonators, and internal quality factor measurements were taken at millikelvin temperatures
We study the loss rate for a set of lambda/2 coplanar waveguide resonators at millikelvin temperatures (20 mK - 900mK) and different applied powers (3E-19 W - 1E-12 W). The loss rate becomes power independent below a critical power. For a fixed power